基于非对称混合等离子体结构的双槽超紧凑偏振分束器.pdf
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1、基于非对称混合等离子体结构的双槽超紧凑偏振分束器王芳1,3,刘花1*,马涛4,马首道1,刘玉芳2(1.河南师范大学电子电气工程学院,河南新乡453007;2.河南省光电传感集成应用重点实验室,河南新乡453007;3.河南省电磁波工程院士工作站,河南新乡453007;4.河南省增材智能制造工程实验室,河南新乡453007)摘要:为了提高偏振分束器的消光比,提出了一种由混合等离子体水平狭缝波导(HSW)和氮化硅混合垂直狭缝波导(VSW)组成的双槽超紧凑偏振分束器(PBS)。同时,包层材料为二氧化硅,既能防止混合等离子体氧化,又便于与其他器件集成。采用有限元方法仿真 HSW 和 VSW 的模态特性
2、。HSW 和 VSW 波导在特定的宽度下 TE 偏振模式是满足相位匹配的,而 TM 偏振模式相位不匹配。因此,HSW 波导中的 TE 模式与 VSW 波导发生强耦合,而 TM 模式直接通过 HSW 波导。结果表明:在 1.55m 的 TE 模式下,PBS 的消光比(ER)为 35.1dB,插入损耗(IL)为 0.34dB,在 TM 模式下,PBS 的 ER 和 IL 分别为 40.9dB 和 2.65dB。所设计的 PBS 有 100nm 的工作带宽,具有高 ER,低 IL 的特点,适用于光子集成电路(PICs)。关 键 词:光子集成电路;偏振分束器;双槽波导中图分类号:O436.3文献标志码
3、:Adoi:10.37188/CO.EN.2022-00281IntroductionInrecentyears,sub-micronwaveguidedeviceshavebeenrealizedusingthelargedifferenceinre-fractiveindexbetweenaSiliconOnInsulator(SOI)coatinglayerandadielectricwaveguidelayerinthemiddle,whichiscompatiblewiththeCMOSpro-cess1.Becauseofthehighrefractiveindexdiffer-e
4、ncebetweensiliconandsilicondioxideintheSOIwaveguide,there is often strong polarization de-pendence,andtheTEandTMmodeshavedifferentpropagation characteristics in the SOI waveguide,whichmakesthebirefringenceeffectofSOI-basedopticalwaveguidedevicessignificantandgivesseri-ouspolarizationsensitivity2.The
5、controlandma-nipulation of polarization states in silicon-basedphotonicintegratedcircuitsareveryimportant.Po-larizationBeamSplitters(PBS)playakeyroleintheseparationandcombinationoftheTEandTMfundamental modes.Ultra-dense on-chip networksgenerallyneedaPBSwithahighExtinctionRatio(ER),lowloss,andwideban
6、dwidth.In recent years,various waveguide structuresthatachievepolarizationbeamsplittinghavebeenreported,suchasMultiModeInterference(MMI)str-uctures3-4,Mach-Zehnder Interferometers(MZI)5,DirectionalCouplers(DC)6-15,andSubWavelengthGrating(SWG)structures16-17.Amongthesestruc-tures,adirectionalcoupleri
7、swidelyusedbecauseofitssuperiorperformanceandsimpledesign;espe-ciallyPBS,whichisdesignedbasedonAsymmet-ricDirectionalCouplers(ADC)andiswidelyusedbecause of its simple structure and low InsertionLoss(IL).Slot waveguides confine light to thenanoscale region of the low refractive index andguidelightpro
8、pagation18-20,whichisproposedfortheuseofpolarizationcontroldevices.Dependingon the direction of the electric field mode in slotwaveguides,theycanbedividedintohorizontalslotwaveguidesandverticalslotwaveguides.Theoptic-al confinement mechanism of slot waveguides istotalinternalreflection,andthewavelen
9、gthsensitiv-ity of slot waveguides is lower than that of strip1216中国光学(中英文)第16卷waveguides.Tosolvethepolarizationproblemandrealizelowlossminiaturizationpassivityofdevices,vari-ouswaveguidestructuresbasedonPBSwerestud-ied.The PBSs based on the radiation loss in thebending Hybrid Plasmonic Waveguide(HP
10、W)structureareproposedinRef.21,whichhaslowlosscharacteristics.InRef.22,aPBSbasedonabent directional coupler is proposed,which hasbroadbandandexcellenttolerancetofabricationer-rors.PBSbasedontwo-dimensionalcylindricalPhCwasstudied.Theresultsshowthattwobeamswithdifferent polarization states can be sep
11、arated in awidewavelengthrangewithERgreaterthan10dB,however,PBSbasedonPhChasacomplexstruc-tureandlargescatteringloss23.DAIDXet al.pro-posedthatPBSbasedonabentDCachievesanul-tra-smallsizeandhighmanufacturingtolerance,buttheERofTEpolarizationisstillnothighduetosomeunwantedresidualcross-couplingintheDC
12、24.Unlike traditional dielectric waveguide sche-mesthatrestrictlighttohighrefractiveindexmedia,restrictinglighttolowrefractiveindexregionshasbeendemonstratedinmanyapplications,suchasop-ticalcommunicationbiosensormodulationandsig-nalprocessing.Inthispaper,weproposeahybridPolarization Beam Splitter(PB
13、S)composed of aplasmaHorizontalSlotWaveguide(HSW)andasil-iconnitridehybridVerticalSlotWaveguide(VSW).Thedesignincludesnotonlyahorizontalslotwave-guide,butalsoaverticalslotwaveguidetransmis-sionTEmodesothattheTE0andTM0modesarelocated in different low exponent regions of thePBS.Therestofthepaperisorga
14、nizedasfollows:thesecondpartisthedesignofthePBS;thethirdpartisthemodepropertiesofthePBSwithvariousstructuralparameters.Inthefourthpart,thepolariz-ationbeamsplittersimulationresultsarepresentedanddiscussed.2WaveguidestructureThe three-dimensional schematic and cross-sectionalviewsofthePBSareshowninFi
15、g.1(a)and(b)(coloronline).AsshowninFig.1(a),thePBSadoptsanasymmetricdirectionalcouplerandconsistsofamixedplasmaHSWandamixedVSWfromasiliconnitridestructure.AscanbeseenfromthetopviewofFig.1(c)(coloronline),theHSWwaveguidecanactasaninputportandbarport.TheVSWwaveguide,ontheotherhand,actsasacrossport.HSW
16、isasandwichstructurecomposedofthesiliconlayerandsilver(Ag)claddingonasiliconoxide substrate.The VSW waveguide consists oftwocorelayers:twothinSiwaveguidesatthebot-tom,whosewidthisdenotedasW4,andathickerSi3N4corelayeratthetop,whosethicknessisde-notedasH3andrepresentsatradeoffbetweenlowlimiting loss a
17、nd simplified fabrication.The totalVSWwaveguideswidthisdenotedasW3.Whentheworkingwavelengthis1.55m,therefractiveindexofSi,SiO2,Si3N4,andAgis3.455,1.445,2,and0.1453+11.3587i,respectively.Thethickersil-iconnitridewaveguideabovetheVSWstructureiseliminated by etching to further suppress ILbetweenthestra
18、ightandcrossports25.(a)(c)(b)W2W1W4t0GSiO2 CladingW3AgSi3N4SiSi SiH2H3H4H1yzxTMTE/TMInput portBar portCross portTEFig.1(a)3D schematic diagram,(b)cross-section and(c)top-viewoftheproposedPBSdeviceToevaluatethepolarizationbeamsplittingper-formance of the PBS,typical indicators includebendingradius(r1
19、),couplinglength(LC),operatingwavelength(),waveguide spacing(G),the total第5期WANGFang,et al.:Double-slotultra-compactpolarizationbeamsplitterbased.1217lengthofthedevice(L1),insertionloss(IL)andex-tinctionratio(ER).The extinction ratio(ER)of the PBS can bedefinedas26:ERTE=10log(Power transfer from Inp
20、ut TE mode to Cross port TE modePower transfer from Input TM mode to Cross Port TM mode),(1)ERTM=10log(Power transfer from Input TM mode to Bar port TM modePower transfer from Input TE mode to Bar Port TE mode).(2)The insertion losses(IL)of the PBS can bedefinedasfollows26:ILTE=10log(Power transfer
21、from Input TE to Cross Port TE mode),(3)ILTM=10log(Power transfer from Input TM to Bar Port TE mode).(4)Thisworkproposesadual-slotultra-compactPBSconsistingofahybridplasmaHSWandasilic-onnitridehybridVSW.ThestructuralparametersoftheHSWandVSWareoptimizedbyusingamodeanalysis of FEM based COMSOL multi-p
22、hysics.TheHSWandVSWwaveguidesarearrangedintonon-uniformtriangulargridsaccordingtotheirop-ticalfield characteristics.The PBS uses a physic-ally-controlledtriangular mesh throughout the do-mainwithaminimummeshsizeof2nmforinputandoutputports.Theminimummeshvalueofothercomputational domains is 5nm,respec
23、tively.Thescatteringboundary condition is used,which re-ducesthereflectedenergy.3ModecharacteristicsAccording to the phase matching conditions,thewidthsoftheVSWandHSW(W2,W3)areop-timallyselectedsothattheeffectiverefractivein-dexrealpartsoftheTEmodeareequal.Then,theTEpolarizedlightincidentfromtheinpu
24、tportisef-fectivelycoupledtotheadjacentVSWthroughthecouplingregion,whiletheTMpolarizedlightisout-puttedfromthebarportwithalmostnocoupling.Asmentionedabove,thewidthsoftheVSWand HSW should only meet the phase-matchingconditions of TE polarization and maximize thephasemismatchofTMpolarization.Itcanbese
25、enfromFig.2(a)(coloronline)thattheeffectivere-fractiveindex of the mode varies with the wave-guidewidth.ThewidthsoftheVSWandHSWareoptimizedforphasematchingbetweenTEmodes,whileRe(neff)oftheTEandTMmodesincreasesgraduallyasthewidthsoftheHSWandVSW(W2orW3)increaseandwhiletheincreasedrateoftheTEmodeislarg
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