栅极腐蚀在线测量技术项目建议书.doc

北京和德宇航技术有限公司
China Head Aerospace Technology Co.

ALTA公司栅极腐蚀在线测量系统
技术建议书

1 Introduction 引文
1.1 Scope 范围
At the end of May 2013 Head Aerospace has requested Alta to provide a formal quotation for an Erosion Measuring System (EMS) to be implemented in a new vacuum chamber of the Customer, the Lanzhou Institute of Physics (LIP), to be used to assess erosion of Gridded Ion Engines.
2013年5月底和德公司要求Alta为可应用于510（LIP）所新型真空灌的腐蚀测量系统（EMS）给出正式报价，该系统用于评估栅极离子发动机（Gridded Ion Engines）的腐蚀情况。
1.2 Applicable documents 适用文件
The following is the complete list of documents to be considered applicable to this proposal:
下表列出了可适用于该投标的所有文件：

1.3 Acronyms and abbreviations 首字母缩略词与缩写词
首字母缩略词/缩写
Meaning
含义
ATP
Authorization To Proceed
授权进行
CO
Close-Out
完结
DAQ
Data AcQuisition
数据采集
EP
Electric Propulsion
电推进
EMS
Erosion Measuring System
腐蚀测量系统
FFP
Firm Fixed Price
固定总价
FMEA
Failure Mode and Effects Analysis
失效模式与影响分析
FSO
Full Scale Output
全量程输出
GIE
Gridded Ion Engine
栅极离子发动机
HET
Hall Effect Thruster
霍尔效应推进器
HW
Hardware
硬件
I/F,IF
InterFace
接口
IR
Infra Red
红外线
LIP
Lanzhou Institute of Physics
510所
MAI
Manufacturing,Assembly, Integration
制造，部装，集成
NDA
Non-Disclosure Agreement
保密协议
QM
Qualification Model
鉴定样机
RPA
Retarding Potential Analyzer
减速电势分析仪
SW
Software
软件
TBC
To Be Confirmed/To be Clarified
留待确定
TBD
To be Determined/Defined
留待决定
TC
ThermoCouple
热电偶
VDC
Volt Direct Current
直流电压
2 Introduction 简介
The present section describes the tele-microscopy and erosion facility implemented in Alta IV-4 facility.
本章将介绍Alta IV-4设备所采用的远程显微镜和腐蚀测量设备。
2.1 Tele-microscopy System for Gridded Ion Engines 栅极离子发动机远程显微镜系统
Alta provides an innovative diagnostics to measure the erosion of the grid holes in Gridded Ion Engines (GIE).
Alta为栅极离子发动机网格空腐蚀情况的测量形成了一种新型的诊断方法。

The Telemicroscopy diagnostic system consists of a special camera mounted on a movable structure placed inside the vacuum facility. The system is maintained in a parking position while the thruster is firing (Figure 1 - bottom), so that it does not interfere with the plasma plume. When the thruster stops firing, the Telemicroscopy system is moved in front of the thruster to perform the erosion measurement. Four led lights or a laser line beam illuminate the thruster during the image acquisition. The motion of the diagnostic system is obtained through two separate stepper motors one governing the arm rotation, the other controlling the arm translation.
远程显微诊断系统为一个专用相机固定于可移动结构上，并放置于真空设备内部。推进器点火时，该系统保持在一个固定位置（图1底部），因此不会接触到等离子羽流。推进器关闭后，远程显微镜系统移动到推进器前方对腐蚀情况进行测量。图像采集时有四盏LED灯或激光线束为推进器照明。诊断系统的移动由两个分开的步进电机控制，一个控制臂的旋转，一个控制臂的移动。

Figure 1 Diagnostic system for GIE erosion measurement: front view (top),
System placed in a parking position when the thruster is firing (bottom)
图1 用于GIE腐蚀测量的诊断系统，正面图（上图），推进器点火时系统处于固定位置（下图）

The system consists of a supporting structure and of an inspection optical head. The supporting structure includes the following main subsystems: 系统由一个支持结构和一个光学探头组成。支持结构主要由以下分系统够成：
l Translation stage移动台
l Rotation stage旋转臂
l Sustaining arm支撑臂
l Protective box保护箱

The optical head consists of a long working distance objective with the following characteristics: 光学探头具有长工作距离物镜，其特性如下:
Parameter参数
Unit单位
Value数值
Field of view视场
mm
5.33
Resolution分辨率
mm
0.005
Depth of Field景深
mm
0.408
Working Distance工作距离
mm
175
The measurement system allows the inspection of the acceleration grid (measurement of the hole diameter variation across a diameter of the grid). 系统也可进行加速极检测（通过一个网格的直径测量孔径的差异）。

Parameter参数
Unit单位
Value数值
GIE diameter range GIE直径范围
mm
50÷300
Image resolution图像分辨率
μm
5
Field of view视场
mm
5.3
Measurement type测量种类
-
Hole diameter孔径
Grid deformation网格变形
Working distance工作距离
mm
175

The Tele-microscopy system has been designed with the aim of performing successive erosion measurements during GIE tests with no need of re-opening the vacuum chamber. This greatly reduces the risk of contamination and saves a considerable amount of time if multiple measurements are to be taken along an endurance test. The remarkable advantage of performing a series of successive measurements lies in the opportunity of recording not only the total erosion after a certain number of firing hours, but also a time-history of the erosion (thus providing information about how the erosion rate varies in time).
远程显微系统的设计可在GIE测试时进行连续腐蚀测量，而无须再次打开真空灌，这大大减小了污染的风险，并且为耐久试验的多次测量节省了大量的时间。连续测量的最大优势不仅可以记录工作数小时后的整体腐蚀情况，也可以记录随时间变化的腐蚀情况（因此可以了解随时间变化的腐蚀速率）。

Figure 2 Calibration images taken on a brand new grid
图2 全新网格的校准图像
2.2 Infrared-Camera System for HET Temperature Measurement 用于HET温度测量的红外照相机不要温度测量的相机可节省多少成本？我们暂时不需这种功能。

By using an infrared camera it is possible to monitor the temperature of the thruster assembly during the test.
Alta provides an advanced diagnostic system with the infrared camera installed right inside the vacuum chamber in order to have an optimal view of the item whose temperature has to be monitored. Besides, in this way the camera can be placed closer to the thruster (w.r.t. an infrared camera placed outside the chamber and operating through one of the available viewports), resulting in a higher spatial resolution of the acquired images.
测试过程中推进器部件的温度可通过红外照相机监测。
Alta提供的带有红外照相机的诊断系统科直接安装于真空管内部，以获得被测物体的最佳视图。此外，相机更加靠近推进器，可获得较高的空间分辨率（放置在真空罐外部的红外相机只能通过一个可用视点照射）。
The infrared camera has the following characteristics:

红外相机具有以下特性：

Parameter参数
Value数值
Measuring Range测量范围
0-800℃
Error误差
<2%
Temperature Resolution温度分辨率
0.08℃
CCD size CCD尺寸
384 X 288 px
Wavelength Range波长范围
8-14 μm

As an option, the following more performing camera could be provided:
* Sensor : microbolometric NON-cooled 384 x 288 pixels
* Spectral range : 8…14 micron
* Measurement Range(s) : 1) 0 - 200 °C
2) 150 - 800 °C
3) 200 - 1000 °C
* Temperature resolution: <80 mK (range 1, 30 °C, 50Hz)
* Field of View (FOV) : 15° x 12°
* Minimal focal distance: 0.75 m
* Target image: about 280 x 205 mm @ 1 m distance
* Pixel measurement spot: 0.8 mm @ 1 m distance
* Different possible acquisition frequencies :selectable between 50Hz, 25Hz, 12.5Hz,….
* Measure uncertainty: 2K(T < 100°C) or 2% of the measured value in °C
* Repeatability: < 1% of the reading
* Measuring distance : from 75 cm to “infinity”
* Working temperature : -10…50 °C
* Interface: Fast Ethernet (real-time 50Hz max)
* 4 I/O digital ports: digital inputs (trigger), digital output (alarm)
* Power Input : 10…36Vcc, 5VA
* Weight : about 1.6 kg
* Dimensions (mm) : 85 x 175 x 107 mm
* Protection : IP54

以下性能较高的相机作为可选项目提供：
Ø 传感器：微测辐射热 非冷却382x288pixels
Ø 光谱范围：8…14 微米
Ø 测量范围：1) 0 - 200 °C
ü 2) 150 - 800 °C
ü 3) 200 - 1000 °C
Ø 温度分变率：<80 mK (range 1, 30 °C, 50Hz)
Ø 视场（FOV）：15° x 12°
Ø 最小焦距： 0.75m
Ø 靶像：约280x205mm@1m距离
Ø 像素测量点：0.8mm@1m距离
Ø 不同采集频率：可选频率50Hz，25Hz，12.5Hz…
Ø 测量不确定度：所测值的2K（T < 100°C）或2%，单位℃
Ø 可重复性：显示的1%
Ø 测量距离：75mm到无限远
Ø 工作温度：-10…50 °C
Ø 接口：快速以太网（最大值实时50Hz）
Ø 种I/O数字分类：数字输入（触发），数字输出（警报）
Ø 电源输入：10…36Vcc, 5VA
Ø 重量：约1.6kg
Ø 外形尺寸（mm）：85 x 175 x 107 mm
Ø 保护：IP54

In Figure 3 a scheme of the infrared-camera system is displayed. The camera is contained in a sealed box, where atmospheric pressure is maintained (since the camera cannot operate in vacuum).
图3为红外相机系统示意图，相机处于密封箱内，可保持大气压强（相机不能再真空环境工作）。

Figure 3: Infrared-camera diagnostic system
图3 红外相机诊断系统
The optical window of the protecting box is made of germanium, a material which is transparent to wavelengths in the range of interest for infrared measurements (8-14 mm). When the camera is turned off, a shutter (actuated by a stepper motor) protects the germanium window from the sputtered particles that could impinge on it. Images acquired with the infrared camera are elaborated via a in-house developed software (a sample screenshot is presented in Figure 4).
保护箱的光学窗口由锗制成，可透过红外波长测量范围（8-14μm）。相机关闭后，步进电机控制的遮光器可保护锗窗，以防溅射颗粒的影响。红外相机采集的图像通过自主研制软件分析（图4是该软件的一个截图）。

Figure 4 Software for handling the images acquired with the infrared camera
图4 红外相机图像处理软件

The list of components of the system is: 系统组件清单：
1) Pressure sensors 压力传感器
2) Glass lenses 玻璃镜头
3) Stepper Motors 步进电机
4) Drivers 驱动器
5) Visual camera(s) 可视相机
6) IR Camera IR相机
7) Structure (adapted to the chosen vacuum facility diameter) 结构（适用所选真空设备直径）
8) Sledge, Guides, Bearings, Gears etc. 拖运器，说明书，轴承，传动装置
9) Cables and connectors 电缆与连接器
10) Feed-throughs 馈入装置
11) Electronics 电子仪器
12) Control Computer 控制计算机
13) Microswitch 微型开关
14) Software 软件
2.3 Literature overview 文献查阅
A list of papers available in literature on the problem of erosion measurement is given below.
以下列出的是关于腐蚀测量的参考文献。
l M.T. Domonkos,A.D. Gallimore, “Thermographic Investigation of 3.2 mm diameter orificed hallow cathodes”, AIAA-98-3793
l S. Mazouffre, J. Perez Luna, D. Gawron, P. Echegut, M. Dudeck, “An infrared thermography study on the thermal load experienced by a high power Hall effect thruster”, 29th IEPC, Princeton, NJ, paper 63 (2005).
l R. E. Stevens, M. T. Domonkos, "Methodology and Feasibility of In-Situ Erosion Measurements in Carbon- Based Ion Thruster Grids by Laser Induced Fluorescence," IEPC-01-311
l M. T. Domonkos, R. E. Stevens, "Assessment of Spectroscopic, Real-Time Ion Thruster Grid Erosion-Rate Measurements," AIAA 2000-3815, 36th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit, 2000.
l E. J. Beiting, “Precision Measurements of Ion-Engine Grids for Erosion Studies”
l J. E. Polk, J .R. Anderson, J. R. Brophy,V. K. Rawlin, M. J. Patterson, J. Sovey, “In Situ, Time-Resolved
l Accelerator Grid Erosion Measurements in the NSTAR 8000 Hour Ion Engine Wear Test “, AIAA 97-1114
l L.S. Mason, R.S. Jankovsky, “1000 hours of testing on a 10 kilowatt Hall effect thruster “, AIAA-2001-3773,
l 37th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit, , 2001
l R.S. Jankovsky, “Preliminary Evaluation of a 10 kW Hall Thruster “, AIAA-99-0456
l J. Tomaszewski. R. Branam, W. Hargus, “Characterization of a Hall Effect Thruster Using Thermographic Imaging “ . AIAA-2007-0584
3 Customer requirements 用户需求
3.1 Introduction 引文
The Lanzhou Institute of Physics aims at the measurement of the grid erosion produced on 1 kW-class ion engines to be placed in a dedicated new vacuum chamber and subjected to long duration tests. Accuracy, easiness of use, and reliability of the system are the key requirements that will be detailed in the next sections.
510所旨在测量其专有的新型真空灌内1kW级等离子发动机所产生的栅极腐蚀，并进行长期测试。操作的精确、可靠、简易和系统的可靠是关键要求，详见一下章节。
3.2 Detailed customer requirements 客户详细要求
R-01 - Target thruster grid dimensions目标推进器栅极尺寸
The erosion measure should be made on grids up to 300 mm in diameter. The grids will not be plane, but curved.
对直径达300mm的栅极进行腐蚀测量，栅极不非平面而是曲面。
R-02 – Primary erosion measurement初始腐蚀测量
The primary erosion measurement will be concerned with the hole erosion on the external grid (a dimension change of few percentage points should be considered as target for the minimum detectable erosion).
初始腐蚀测量主要涉及的是外部栅极的孔腐蚀（最小可测腐蚀应考虑到几个百分点的外形变化）。
R-03 – Secondary erosion measurement 二次腐蚀测量
Pit-groove erosion should also be measured, if possible (if compatible with resolution and illumination). 如可以也应测量坑槽腐蚀（如果符合分辨率与光照条件）
R-04 – Additional Feature附加特性
If possible, the ESM software should allow a posteriori reconstruction of a 3D image from two separate pictures taken with slightly different angle of the camera(s).
如果可以，ESM软件通过两张角度略有差别的图像可后期合成3D图像。
R-05 - Type of thruster推进器类型
The used thruster will be a Gridded Ion Engine. 栅极离子发动机
R-06 – Thruster dimensions and weight推进器尺寸与重量
The thruster diameter will be less or equal to 300 mm.
The thruster weight will be less or equal to 10 kg.
尺寸≤300mm
重量≤10kg
R-07 – Environmental requirements环境要求
The EMS should be compatible with the IPL laboratory environmental requirements, summarized below: EMS应满足510所实验室的环境要求：
o Vacuum degree: 1x10-3 Pa to1x10-2 Pa;
o Cleanliness level: laboratory;
o Temperature: 0-40 °C;
o Humidity: 10-60 %;
o Available power: 220 V AC
真空度：1x10-3 Pa to1x10-2 Pa；
洁净度：实验室；
温度： 0-40 °C；
湿度：10-60 %；
可用电源：220V AC
R-08 – Vacuum chamber requirements真空罐要求不是这台设备用，请与杨俊泰在沟通一下。

The EMS should be used in a new vacuum chamber, 2 m in diameter for about 5 m in length, described in the scheme of Figure 5 and Figure 6.
真空罐直径2m，长约5m，见图5，6。

Figure 1 Top view: the two DN100 flanges in the red box can be used by ALTA
图1 顶视图：ALTA可利用红框内的2个DN100凸缘

1 液氮储供系统
2 副舱真空容器
3 推力器热控装置
4 安装电源专用副舱
5 主舱真空容器
6 真空抽气系统
7 地面氙供气单元
8 离子推力器地面供电电源
9 电推进控制系统
10 真空抽气和推力器温控控制系统
11 冷却水系统
12 气动元件供气系统

Figure 2 Side view: the three DN100 flanges in the red box can be used by ALTA
图2 侧视图：ALTA可利用红框内的3个DN100凸缘

13 液氮进出接口
14 推力器安装架
15 主舱电、气接口
16 主舱真空容器
17 真空规接口
18 鞍座
19 离子束靶
R-09 – Mechanical interface with the vacuum chamber与真空罐机械接口
Alta should clarify the required mechanical interface between the EMS and the vacuum facility.
Alta确定EMS与真空罐之间的机械接口。
R-10 – Electrical interfaces电接口
The electrical components, including wires and cables, should be compatible with high voltage operation. In particular, the expected peak voltage is about 1500 V and the max peak current is 12A. The electrical components should be certified for at least 2500 V operation.
电组件，含电线电缆，应能适应高压工作。最高电压约为1500V，最大电流12A，电组件应至少能承受2500V的电压。
R-11 – Feed-throughs, connectors, and flanges馈入装置，连接器和凸缘
The feed-throughs for the erosion measuring system stand should be realized in compatibility with the available flanges (Figure 6).
腐蚀测量系统的馈入装置应符合可用凸缘（图6）。
R-12 – Control software requirements控制软件要求
The control software provided with the EMS, should be capable of:
o Perform atmospheric and in-vacuum preliminary setup (“calibration”)
o Provide measurement of erosion in terms of circle diameters, linear length, depth of grooves/pits (not in real-time).
o Provide alarms and possible information on recovery actions in case of EMS failures.
o Being provided with highly automated procedures.
o Being provided with extensive User Manual.
o Being realized with easiness of use as key requirement.

EMS配有的控制软件应：
Ø 可在大气压下和真空中进行初始安装（“校准”）。
Ø 可测量腐蚀的圆圈直径，线性长度，坑/槽处深度（非实时）。
Ø EMS一旦故障，发出警报，提供修复相关信息。
Ø 程序高度自动化。
Ø 全面的用户手册。
Ø 操作简便。
R-13 – Control software source code控制软件源代码
An option in the quotation should be present concerning the possibility of purchasing the control s